A novel interferometric ellipsometer with no moving parts which uses a semiconductor laser diode as the source is described. Temporal fringes are produced by modulation of the bias current and unbalanced arms in the interferometer.


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    Title :

    Novel interferometric ellipsometer with wavelength-swept source


    Contributors:


    Publication date :

    2004-01-01


    Size :

    180635 byte



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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