Here we describe a heterodyne interferometric ellipsometer that uses an inexpensive semiconductor laser diode as the source. Small wavelength changes caused by modulating the bias current are converted into temporal fringes by arranging the two arms of the interferometer to be of unequal length. Measurements show that the optical properties of a variety of samples can be determined with high accuracy.


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    Title :

    A heterodyne interferometric ellipsometer


    Contributors:


    Publication date :

    2005-01-01


    Size :

    175043 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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