We report in this work the fabrication and optical characterization of micromirrors with inversed pyramidal shape (pits). The pyramids are etched on silicon using an anisotropic etchant and then gold coated to form a mirror.


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    Title :

    Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH


    Contributors:
    Moktadir, Z. (author) / Prakash, G.V. (author) / Koukharenko, E. (author) / Gollasch, C. (author) / Bagnall, D.M. (author) / Kraft, M. (author) / Hinds, E. (author) / Baumberg, J.J. (author)


    Publication date :

    2004-01-01


    Size :

    180012 byte



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English





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