We report in this work the fabrication and optical characterization of micromirrors with inversed pyramidal shape (pits). The pyramids are etched on silicon using an anisotropic etchant and then gold coated to form a mirror.
Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH
Conference on Lasers and Electro-Optics, 2004. (CLEO). ; 2 ; 2 pp. vol.2
01.01.2004
180012 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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