Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    3D surface topography and reflectivity of anisotropic etched silicon micromirrors for BioMEMS


    Contributors:
    Mackay, R. E. (author) / Lionis, N. (author) / Le, H. R. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 12 ; 1763-1770


    Publication date :

    2011-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH

    Moktadir, Z. / Prakash, G.V. / Koukharenko, E. et al. | IEEE | 2004


    Lineselective CO/sub 2/ lasers with anisotropic etched silicon gratings

    Schuh, R. / Hagen, J. / Schmidt, L.-P. | IEEE | 2003


    Thermally invariant all-dielectric micromirrors

    Wei Liu, / Talghader, J.J. | IEEE | 2001


    Replicated x-ray micromirrors [3766-42]

    Pina, L. / Inneman, A. / Hudec, R. et al. | British Library Conference Proceedings | 1999


    Digital micromirrors enable holographic video display

    Huebschman, M. / Munjuluri, B. / Garner, H. | British Library Online Contents | 2004