All-dielectric micromirrors are reported that maintain their shape to within /spl lambda//60 at 633 nm over a range of 30 C, limited by the measurement apparatus. In tandem with the experimental results, thermally invariant coating design is discussed along with thermal expansion results from some common dielectric coating materials.


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    Title :

    Thermally invariant all-dielectric micromirrors


    Contributors:
    Wei Liu, (author) / Talghader, J.J. (author)


    Publication date :

    2001-01-01


    Size :

    322536 byte





    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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