All-dielectric micromirrors are reported that maintain their shape to within /spl lambda//60 at 633 nm over a range of 30 C, limited by the measurement apparatus. In tandem with the experimental results, thermally invariant coating design is discussed along with thermal expansion results from some common dielectric coating materials.
Thermally invariant all-dielectric micromirrors
2001-01-01
322536 byte
Conference paper
Electronic Resource
English
MI4 Thermally Invariant All-Dielectric Micromirrors
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