Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    MOEMS Pyramidal micromirrors assist atom-chip development


    Published in:

    LASER FOCUS WORLD ; 42 , 4 ; 28


    Publication date :

    2006-01-01


    Size :

    28 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.366



    MOEMS Electrostatic Scanning Micromirrors Design and Fabrication

    Patterson, P. R. / Hah, D. / Su, G. J. et al. | British Library Conference Proceedings | 2002


    Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH

    Moktadir, Z. / Prakash, G.V. / Koukharenko, E. et al. | IEEE | 2004


    Thermally invariant all-dielectric micromirrors

    Wei Liu, / Talghader, J.J. | IEEE | 2001


    Integrated 1/spl times/4 wavelength-selective switch with on-chip MEMS micromirrors

    Chi, C.-H. / Tsai, J. / Lee, M.-C.M. et al. | IEEE | 2005


    Replicated x-ray micromirrors [3766-42]

    Pina, L. / Inneman, A. / Hudec, R. et al. | British Library Conference Proceedings | 1999