Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Silicon 45° micromirrors fabricated by etching in alkaline solutions with organic additives


    Contributors:
    Rola, K. P. (author) / Ptasiński, K. (author) / Zakrzewski, A. (author) / Zubel, I. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 2 ; 221-226


    Publication date :

    2014-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon with KOH

    Moktadir, Z. / Prakash, G.V. / Koukharenko, E. et al. | IEEE | 2004


    Analysis of adsorption of alcohol additives in the process of silicon etching in alkaline solutions [5124-15]

    Zubel, I. / Kramkowska, M. / International Society of Optical Engineering et al. | British Library Conference Proceedings | 2003




    Thermally invariant all-dielectric micromirrors

    Wei Liu, / Talghader, J.J. | IEEE | 2001