A substrate gripper apparatus is provided. Substrate gripper apparatus includes a body, a first slide member moveable relative to the body, a first finger mounting member coupled to the first slide member, a first lower finger coupled to the first finger mounting member, and a first pivoting finger coupled to the first finger mounting member. First pivoting member may impose a force on a substrate due to gravity. Methods of operating the substrate gripper apparatus as well as other aspects are provided.


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    Title :

    Substrate gripper apparatus and methods


    Contributors:
    VELAZQUEZ EDWIN (author) / HOEY GEE (author) / ATKINSON JIM K (author)

    Publication date :

    2016-05-31


    Type of media :

    Patent


    Type of material :

    Electronic Resource


    Language :

    English


    Classification :

    IPC:    B66C Krane , CRANES / B25J Manipulatoren , MANIPULATORS



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