A substrate gripper apparatus is provided. Substrate gripper apparatus includes a body, a first slide member moveable relative to the body, a first finger mounting member coupled to the first slide member, a first lower finger coupled to the first finger mounting member, and a first pivoting finger coupled to the first finger mounting member. First pivoting member may impose a force on a substrate due to gravity. Methods of operating the substrate gripper apparatus as well as other aspects are provided.


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    Titel :

    Substrate gripper apparatus and methods


    Beteiligte:
    VELAZQUEZ EDWIN (Autor:in) / HOEY GEE (Autor:in) / ATKINSON JIM K (Autor:in)

    Erscheinungsdatum :

    31.05.2016


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Englisch


    Klassifikation :

    IPC:    B66C Krane , CRANES / B25J Manipulatoren , MANIPULATORS



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