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    Title :

    A one chip, polysilicon, surface micromachined pressure sensor with integrated CMOS signal conditioning electronics


    Additional title:

    Ein ein-chip, Polysilizium, oberflaechen-mikrobearbeiteter Drucksensor mit integrierter CMOS Elektronik zur Signalaufbereitung.


    Contributors:

    Publication date :

    1996


    Size :

    6 pages


    Remarks:

    SAE-Paper;960757;1996;Sensors and Actuators 1996;SAE Spec.Publ.; SP-1133


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



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