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    Title :

    Actuation of polysilicon surface-micromachined mirrors [2687-07]


    Contributors:

    Conference:

    Conference, Miniaturized systems with micro-optics and micromechanics ; 1996 ; San Jose; CA



    Publication date :

    1996-01-01


    Size :

    7 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Optical network of silicon micromachined sensors [2687-10]

    Wilson, M. L. / Burns, D. W. / Zook, J. D. et al. | British Library Conference Proceedings | 1996


    Nr. 2687

    DataCite | 1897


    Aspherization of cylindrical lenses by laser irradiation [2687-20]

    Veiko, V. P. / Shakola, A. T. / Jakovlev, E. B. et al. | British Library Conference Proceedings | 1996


    Magnetically actuated MEMS scanning mirror [2687-06]

    Miller, R. A. / Burr, G. W. / Tai, Y.-C. et al. | British Library Conference Proceedings | 1996


    Novel method for making parabolic grating [2687-17]

    Chen, B. / Guo, L. / Tang, J. et al. | British Library Conference Proceedings | 1996