Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Optical network of silicon micromachined sensors [2687-10]


    Contributors:

    Conference:

    Conference, Miniaturized systems with micro-optics and micromechanics ; 1996 ; San Jose; CA



    Publication date :

    1996-01-01


    Size :

    11 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Actuation of polysilicon surface-micromachined mirrors [2687-07]

    Tien, N. C. / Kiang, M.-H. / Daneman, M. J. et al. | British Library Conference Proceedings | 1996


    Nr. 2687

    DataCite | 1897


    Micromirror arrays for active optical aberration control [2687-02]

    Gustafson, S. C. / Tuthill, T. A. / Watson, E. A. et al. | British Library Conference Proceedings | 1996


    Analysis of optical beam steering using phased micromirror arrays [2687-08]

    Watson, E. A. / Miller, A. R. / SPIE | British Library Conference Proceedings | 1996


    Magnetically actuated MEMS scanning mirror [2687-06]

    Miller, R. A. / Burr, G. W. / Tai, Y.-C. et al. | British Library Conference Proceedings | 1996