A one chip, polysilicon, surface micromachined pressure sensor with integrated CMOS signal conditioning electronics
Ein ein-chip, Polysilizium, oberflaechen-mikrobearbeiteter Drucksensor mit integrierter CMOS Elektronik zur Signalaufbereitung.
1996
6 pages
SAE-Paper;960757;1996;Sensors and Actuators 1996;SAE Spec.Publ.; SP-1133
Sonstige
Englisch
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