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    Title :

    A One Chip, Polysilicon, Surface Micromachined Pressure Sensor with Integrated CMOS Signal Conditioning Electronics



    Conference:

    Session; International congress, Sensors and actuators 1996 ; 1996 ; Detroit; MI



    Publication date :

    1996-01-01


    Size :

    6 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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