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    Title :

    Surface micromachined accelerometer:a technology update


    Additional title:

    Surface Micromachined Beschleunigungsmesser:ein technologisches Update.



    Publication date :

    1991


    Size :

    9 pages


    Remarks:

    SAE-Paper;910496;1991;Sensors and Actuators 1991;SAE Proc.; P-242


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



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