Surface micromachined accelerometer:a technology update
Surface Micromachined Beschleunigungsmesser:ein technologisches Update.
1991
9 pages
SAE-Paper;910496;1991;Sensors and Actuators 1991;SAE Proc.; P-242
Sonstige
Englisch
Fabrication technology for an integrated surface-micromachined sensor
Tema Archiv | 1993
|Surface Micromachined Angular Rate Sensor
SAE | 1995
|Surface Micromachined Angular Rate Sensor
British Library Conference Proceedings | 1995
|Surface micromachined angular rate sensor
Kraftfahrwesen | 1995
|