Access

    Access via TIB

    Check availability in my library


    Export, share and cite



    Title :

    Single crystal silicon low-g acceleration sensor


    Additional title:

    Einkristall-Beschleunigungssensor fuer die Messung kleiner Beschleunigungen.



    Publication date :

    2002


    Size :

    5 pages


    Remarks:

    SAE-Paper;2002-01-1080;2002;Sensors and Actuators 2002;SAE Spec.Publ.; SP-1659


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



    Single Crystal Silicon Low-g Acceleration Sensor

    Johnson, Jack D. / Christenson, John C. / Zarabadi, Seyed R. et al. | SAE Technical Papers | 2002


    2002-01-1080. Single Crystal Silicon Low-g Acceleration Sensor

    Johnson, J. D. / Zarabadi, S. R. / Christenson, J. C. et al. | British Library Conference Proceedings | 2002


    The study of silicon bulk micromachined angular acceleration sensor

    Mizuno,J. / Nottmeyer,K. / Amemori,M. et al. | Automotive engineering | 2000



    The study of silicon bulk micromachined angular acceleration sensor

    Mizuno, J. / Nottmeyer, K. / Amemori, M. et al. | Tema Archive | 2000