Single crystal silicon low-g acceleration sensor
Einkristall-Beschleunigungssensor fuer die Messung kleiner Beschleunigungen.
2002
5 pages
SAE-Paper;2002-01-1080;2002;Sensors and Actuators 2002;SAE Spec.Publ.; SP-1659
Miscellaneous
English
Single Crystal Silicon Low-g Acceleration Sensor
SAE Technical Papers | 2002
|2002-01-1080. Single Crystal Silicon Low-g Acceleration Sensor
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