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    Title :

    MEMS Reliability: From Experimental Results to the Understanding of Physical Phenomena


    Contributors:
    Pressecq, Francis (author) / Schmitt, P. (author) / Veyrie, D. (author) / Duong, Q. (author) / Lafontan, X. (author) / Lellouchi, D. (author)

    Conference:

    CANEUS 2004 Conference on Micro-Nano-Technologies ; 2004 ; Monterey , California



    Publication date :

    2004-01-01



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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