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    Title :

    AIAA-2004-6744 MEMS Reliability: From Experimental Results to the Understanding of Physical Phenomena


    Contributors:
    Pressecq, F. (author) / Schmitt, P. (author) / Veyrie, D. (author) / Duong, Q. (author) / Lafontan, X. (author) / Lellouchi, D. (author)

    Conference:

    Conference, Micro-nano-technologies for aerospace applications; A collection of the CANEUS 2004 ; 2004 ; Monterey, Calif



    Publication date :

    2004-01-01


    Size :

    6 pages



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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