In modern cars, micro sensors play an essential and still increasingly important role as the interface between the vehicle with its complex functions of motor management, chassis systems, safety as well as comfort and convenience on the one hand and the respective electronic control units on the other. They have to fulfil their task in a harsh environment over the entire automobile lifetime. Therefore reliability aspects have moved more and more into the focus of engineering and research activities in microsystem technology. A methodical procedure is described, which approaches reliability issues efficiently. The implementation of the methodology is illustrated with a real-life example on the basis of the dynamic mechanical stress of a thin membrane in a hot film mass airflow sensor.
Reliability of MEMS - a methodical approach
ESREF, European Symposium on Reliability of Electron Devices, Failure Physics and Analysis, 13 ; 1771-1776
Microelectronics Reliability ; 42 , 9-11
2002
6 Seiten, 8 Quellen
Conference paper
English
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