During the last decade, research and development of microelectromechanical systems (MEMS) has shown a significant promise for a variety of commercial applications including automobile and medical purposes.


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    Title :

    Reliability Issues of COTS MEMS Packaging


    Contributors:

    Conference:

    GOMAC 2000


    Publication date :

    2000-03-20


    Type of media :

    Conference paper


    Type of material :

    No indication


    Language :

    English




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