Research and development of Micro-Electro-Mechanical Systems (MEMS) in the last decade has shown a significant promise for a variety of commercial applications including automobile and medical purposes.
Reliability Assessment of COTS MEMS Components for Aerospace Environment
International Society for Optical Engineering (SPIE)
1999-09-01
Conference paper
No indication
English
CANEUS2006-11088 MEMS Reliability Assessment Methodology for Aerospace Applications
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