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    Title :

    Direct simulation of chemical deposition of silicon


    Contributors:

    Conference:

    31st Thermophysics Conference ; 1996 ; New Orleans , LA , U.S.A.



    Publication date :

    1996-01-01



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




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    Chemical-vapor deposition of silicon from silane

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    Direct simulation of chemical reactions

    STARK, J. P. W. / BOYD, I. D. | AIAA | 1990