Direct simulation of chemical deposition of silicon
31st Thermophysics Conference ; 1996 ; New Orleans , LA , U.S.A.
01.01.1996
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Direct Simulation of the Chemical Deposition of Silicon
British Library Conference Proceedings | 1996
|Chemical-Vapor Deposition Of Silicon Carbide
NTRS | 1993
|Chemical Vapor Deposition of Germanium of Silicon
NTRS | 1983
|Chemical-vapor deposition of silicon from silane
NTRS | 1979
|Direct simulation of chemical reactions
AIAA | 1990
|