Direct Simulation of the Chemical Deposition of Silicon
Conference; 31st, 31st AIAA thermophysics conference ; 1996 ; New Orleans; LA
01.01.1996
ALL
Nos 96-1800 to 96-1911 with gaps; See also 6369.400F nos 96-1800 to 96-2277 for separate papers on microfiche and 6237.630 for 2 separate papers nos 51 and 57
Aufsatz (Konferenz)
Englisch
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Direct simulation of chemical deposition of silicon
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