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    Title :

    Direct Simulation of the Chemical Deposition of Silicon


    Contributors:

    Conference:

    Conference; 31st, 31st AIAA thermophysics conference ; 1996 ; New Orleans; LA


    Publication date :

    1996-01-01


    Size :

    ALL


    Remarks:

    Nos 96-1800 to 96-1911 with gaps; See also 6369.400F nos 96-1800 to 96-2277 for separate papers on microfiche and 6237.630 for 2 separate papers nos 51 and 57


    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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