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    Title :

    Suspended high Q integrated inductor by wafer level packaging technology


    Contributors:
    Han, M. (author) / Wang, S. F. (author) / Xu, G. W. (author) / Luo, L. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 21 , 1 ; 215-219


    Publication date :

    2015-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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