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    Title :

    Fabrication of a MEMS capacitive accelerometer with symmetrical double-sided serpentine beam-mass structure


    Contributors:
    Zhou, X. (author) / Che, L. (author) / Lin, Y. (author) / Li, X. (author) / Wu, J. (author) / Wang, Y. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 20 , 7 ; 1365-1372


    Publication date :

    2014-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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