Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Optimization of MEMS capacitive accelerometer


    Contributors:

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 19 , 5 ; 713-720


    Publication date :

    2013-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    An All-Silicon Comb-Tooth Capacitive MEMS Accelerometer

    Niu, Haobin / Sun, Guoliang / Wang, Shuaimin et al. | Springer Verlag | 2022


    A MEMS sandwich differential capacitive silicon-on-insulator accelerometer

    Zhang, Y. / Yang, G. / Gao, C. et al. | British Library Online Contents | 2013


    Testing of MEMS capacitive accelerometer structure through electro-static actuation

    Kar, S. K. / Swamy, K. B. / Mukherjee, B. et al. | British Library Online Contents | 2013


    Design of an SOI-MEMS high resolution capacitive type single axis accelerometer

    Mistry, K. K. / Swamy, K. B. / Sen, S. | British Library Online Contents | 2010


    MEMS Accelerometer Design Optimization Using Genetic Algorithm

    Krushnasamy, V.S. / Juliet, A.Vimala | Tema Archive | 2013