Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Design of an SOI-MEMS high resolution capacitive type single axis accelerometer


    Contributors:
    Mistry, K. K. (author) / Swamy, K. B. (author) / Sen, S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 12 ; 2057-2066


    Publication date :

    2010-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Optimization of MEMS capacitive accelerometer

    Benmessaoud, M. / Nasreddine, M. M. | British Library Online Contents | 2013


    Low-g, dual-axis MEMS accelerometer

    British Library Online Contents | 1998


    An All-Silicon Comb-Tooth Capacitive MEMS Accelerometer

    Niu, Haobin / Sun, Guoliang / Wang, Shuaimin et al. | Springer Verlag | 2022


    A MEMS sandwich differential capacitive silicon-on-insulator accelerometer

    Zhang, Y. / Yang, G. / Gao, C. et al. | British Library Online Contents | 2013


    Design and simulation of a high-performance Z-axis SOI-MEMS accelerometer

    Sharaf, A. / Sedky, S. | British Library Online Contents | 2013