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    Title :

    Testing of MEMS capacitive accelerometer structure through electro-static actuation


    Contributors:
    Kar, S. K. (author) / Swamy, K. B. (author) / Mukherjee, B. (author) / Sen, S. (author)

    Published in:

    Publication date :

    2013-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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