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    Title :

    VM-TEST: Mechanical property measurement using electrostatically actuated vertical MEMS test structures fabricated in thick metal layers


    Contributors:

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 4 ; 443-452


    Publication date :

    2012-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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