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    Title :

    Mechanical Behavior of an Electrostatically Actuated Micropump


    Contributors:

    Conference:

    43rd AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics, and Materials Conference ; 2002 ; Denver , Colorado



    Publication date :

    2002-01-01




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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