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    Title :

    Mechanical testing of micro samples produced by a novel LIGA related process chain


    Contributors:
    Prokop, J. (author) / Eberl, C. (author) / Funk, M. (author) / Prüfe, P. (author) / Lorenz, J. (author) / Piotter, V. (author) / Welz, M. (author) / Ritzhaupt-Kleissl, H. J. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 2 ; 281-288


    Publication date :

    2011-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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