Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Micro-Structures of TiC/Ti~5Si~3 composite produced by powder metallurgy and LIGA process


    Contributors:
    Miyano, N. (author) / Iwasa, H. (author) / Matsumoto, M. (author) / Ameyama, K. (author) / Sugiyama, S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 4/5 ; 374-378


    Publication date :

    2005-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Micro-optical structures realized by LIGA technology

    Gerner, M. / Schift, H. / Bauer, H.D. et al. | IEEE | 1994


    Mechanical testing of micro samples produced by a novel LIGA related process chain

    Prokop, J. / Eberl, C. / Funk, M. et al. | British Library Online Contents | 2011


    Wear resistant tools for reproduction technologies produced by micro powder metallurgy

    Rota, A. / Duong, T.-V. / Hartwig, T. | British Library Online Contents | 2002


    High aspect ratio electrostatic micro actuators using LIGA process

    Kondo, R. / Takimoto, S. / Suzuki, K. et al. | British Library Online Contents | 2000


    Powder-Metallurgy Process And Product

    Paris, Henry G. | NTRS | 1988