Silicon Waveguide Sidewall Smoothing by KrF Excimer Laser Reformation
JOURNAL OF LIGHTWAVE TECHNOLOGY ; 27 , 7 ; 887-892
2009-01-01
6 pages
Article (Journal)
English
DDC: | 621.3692 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Silicon Waveguide Sidewall Smoothing by Wet Chemical Oxidation
British Library Online Contents | 2005
|Oxidation Smoothing of Sidewall Roughness in AlGaAs Heterostructure Waveguides
British Library Conference Proceedings | 2005
|Excimer laser machining of silicon nitride
Automotive engineering | 1991
|Laser maps tire-sidewall flaws
British Library Online Contents | 2003