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    Title :

    Excimer laser machining of silicon nitride


    Additional title:

    Bearbeitung von Siliziumnitrid Keramik mit Excimer Laser.



    Publication date :

    1991


    Size :

    8 pages


    Remarks:

    4th Int.Symposium on Ceramic Materials and Components for Engines,Goeteborg 1991; 1992;Verl.:Elsevier


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



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