We have created conical microstructures on sintered flat TiO/sub 2/ and Si/sub 3/N/sub 4/ by near-threshold KrF laser ablation. The surface morphology and the chemical composition were analyzed with SEM and XPS, respectively.


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    Title :

    Microstructure on titanium oxide and silicon nitride formed by KrF excimer laser ablation


    Contributors:
    Shimoda, T. (author) / Takahashi, K. (author) / Obara, M. (author)


    Publication date :

    2001-01-01


    Size :

    134485 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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