We have created conical microstructures on sintered flat TiO/sub 2/ and Si/sub 3/N/sub 4/ by near-threshold KrF laser ablation. The surface morphology and the chemical composition were analyzed with SEM and XPS, respectively.
Microstructure on titanium oxide and silicon nitride formed by KrF excimer laser ablation
2001-01-01
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Conference paper
Electronic Resource
English
Microstructure on Titanium Oxide and Silicon Nitride Formed by KrF Excimer Laser Ablation
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