We have created conical microstructures on sintered flat TiO/sub 2/ and Si/sub 3/N/sub 4/ by near-threshold KrF laser ablation. The surface morphology and the chemical composition were analyzed with SEM and XPS, respectively.


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    Titel :

    Microstructure on titanium oxide and silicon nitride formed by KrF excimer laser ablation


    Beteiligte:
    Shimoda, T. (Autor:in) / Takahashi, K. (Autor:in) / Obara, M. (Autor:in)


    Erscheinungsdatum :

    01.01.2001


    Format / Umfang :

    134485 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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