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    Title :

    Silicon Waveguide Sidewall Smoothing by Wet Chemical Oxidation


    Contributors:

    Published in:

    Publication date :

    2005-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    621.3692



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