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    Title :

    Wafer-level plasma activated bonding: new technology for MEMS fabrication


    Contributors:
    Dragoi, V. (author) / Mittendorfer, G. (author) / Thanner, C. (author) / Lindner, P. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 4-5 ; 509-515


    Publication date :

    2008-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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