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    Title :

    Influence of van der Waals force on the pull-in parameters of cantilever type nanoscale electrostatic actuators


    Contributors:
    Ramezani, A. (author) / Alasty, A. (author) / Akbari, J. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 12 ; 1153-1161


    Publication date :

    2006-01-01


    Size :

    9 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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