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    Title :

    Silicon cantilever sensor for micro-/nanoscale dimension and force metrology


    Contributors:
    Peiner, E. (author) / Doering, L. (author) / Balke, M. (author) / Christ, A. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 4-5 ; 441-451


    Publication date :

    2008-01-01


    Size :

    11 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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