Influence of van der Waals force on the pull-in parameters of cantilever type nanoscale electrostatic actuators
MICROSYSTEM TECHNOLOGIES ; 12 , 12 ; 1153-1161
01.01.2006
9 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Feedback control of vibrations in a micromachined cantilever beam with electrostatic actuators
Online Contents | 1998
|Cantilever type large-stroke precise push-pull device
Europäisches Patentamt | 2023
|Silicon cantilever sensor for micro-/nanoscale dimension and force metrology
British Library Online Contents | 2008
|Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage
British Library Online Contents | 2006
|Digital active vibration control of a cantilever beam with piezoelectric actuators
Tema Archiv | 1991
|