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    Title :

    Application of piezoelectric layers in electrostatic MEM actuators: controlling of pull-in voltage


    Contributors:
    Rezazadeh, G. (author) / Tahmasebi, A. (author) / Zubstov, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 12 ; 1163-1170


    Publication date :

    2006-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Controlling Plate Vibrations Using Piezoelectric Actuators

    Falangas, E. / Dworak, J. / Koshigoe, S. | British Library Online Contents | 1994


    Methods for controlling plate vibrations using piezoelectric actuators

    FALANGAS, E. / DWORAK, J. / KOSHIGOE, S. | AIAA | 1993


    Methods for Controlling Plate Vibrations Using Piezoelectric Actuators

    Falangas, E. / Dworak, J. / Koshigoe, S. et al. | British Library Conference Proceedings | 1993