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    Title :

    Super slim automotive acceleration sensor fabrication process developed by applying surface MEMS technology



    Conference:

    Fall Annual congress, Society of Automotive Engineers of Japan; 2006 JSAE annual congress ; 2006 ; Sapporo, Japan



    Publication date :

    2006-01-01


    Size :

    141-06


    Remarks:

    Text in Japanese & English. Papers 82-06 - 142-06 with gaps



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    Japanese




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    Super Slim Automotive Acceleration Sensor Applied MEMS Technology

    Isobe, Y. | British Library Conference Proceedings | 2006


    Ultra-slim automotive acceleration sensor applied MEMS technology

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    Ultra-Slim Automotive Acceleration Sensor Applied MEMS Technology

    Hiroshi, Muto / Fujino, Seiji / Fukada, Tsuyoshi et al. | SAE Technical Papers | 2005