Super slim automotive acceleration sensor fabrication process developed by applying surface MEMS technology
Fall Annual congress, Society of Automotive Engineers of Japan; 2006 JSAE annual congress ; 2006 ; Sapporo, Japan
2006-01-01
141-06
Text in Japanese & English. Papers 82-06 - 142-06 with gaps
Conference paper
Japanese
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SAE Technical Papers | 2006
|Automotive engineering | 2006
|Super Slim Automotive Acceleration Sensor Applied MEMS Technology
British Library Conference Proceedings | 2006
|Ultra-slim automotive acceleration sensor applied MEMS technology
Automotive engineering | 2005
|Ultra-Slim Automotive Acceleration Sensor Applied MEMS Technology
SAE Technical Papers | 2005
|