Super slim automotive acceleration sensor fabrication process development by applying surface MEMS technology
Die MEMS Technolgie fuer die Herstellung eines super-schlanken Automotive Beschleunigungssensors.
2006
7 pages
SAE-Paper;2006-01-1464;2006
Miscellaneous
English
British Library Conference Proceedings | 2006
|Super Slim Automotive Acceleration Sensor Applied MEMS Technology
British Library Conference Proceedings | 2006
|Ultra-slim automotive acceleration sensor applied MEMS technology
Automotive engineering | 2005
|