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    Title :

    Super slim automotive acceleration sensor fabrication process development by applying surface MEMS technology


    Additional title:

    Die MEMS Technolgie fuer die Herstellung eines super-schlanken Automotive Beschleunigungssensors.


    Contributors:
    Sugiura,K. (author) / Muto,H. (author) / Fukada,T. (author) / Fujino,S. (author) / Denso,JP

    Publication date :

    2006


    Size :

    7 pages


    Remarks:

    SAE-Paper;2006-01-1464;2006


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



    Super Slim Automotive Acceleration Sensor Fabrication Process Developed by Applying Surface MEMS Technology

    Muto, Hiroshi / Sugiura, Kazuhiko / Asami, Kazushi et al. | SAE Technical Papers | 2006


    Super slim automotive acceleration sensor fabrication process developed by applying surface MEMS technology

    Yokoyama, K. / Sugiura, K. / Fukada, T. et al. | British Library Conference Proceedings | 2006


    Super Slim Automotive Acceleration Sensor Applied MEMS Technology

    Isobe, Y. | British Library Conference Proceedings | 2006


    Ultra-slim automotive acceleration sensor applied MEMS technology

    Isobe,Y. / Fukada,T. / Muto,H. et al. | Automotive engineering | 2005


    Ultra-Slim Automotive Acceleration Sensor Applied MEMS Technology

    Hiroshi, Muto / Fujino, Seiji / Fukada, Tsuyoshi et al. | SAE Technical Papers | 2005