Access

    Access via TIB

    Check availability in my library


    Export, share and cite



    Title :

    Ultra-slim automotive acceleration sensor applied MEMS technology


    Additional title:

    Anwendung der MEMS Technologie auf die Fertigung eines ultra-duennen Beschleunigungssensors fuer Kraftwagen.


    Contributors:
    Isobe,Y. (author) / Fukada,T. (author) / Muto,H. (author) / Fujino,S. (author) / Denso,JP

    Publication date :

    2005


    Size :

    6 pages


    Remarks:

    SAE-Paper;2005-01-0463;2005;Automotive Electronics;SAE Spec.Publ.; SP-1980


    Type of media :

    Miscellaneous


    Type of material :

    Print


    Language :

    English



    Ultra-Slim Automotive Acceleration Sensor Applied MEMS Technology

    Hiroshi, Muto / Fujino, Seiji / Fukada, Tsuyoshi et al. | SAE Technical Papers | 2005


    Super Slim Automotive Acceleration Sensor Applied MEMS Technology

    Isobe, Y. | British Library Conference Proceedings | 2006


    2005-01-0463 Ultra-Slim Automotive Acceleration Sensor Applied MEMS Technology

    Isobe, Y. / Fukada, T. / Muto, H. et al. | British Library Conference Proceedings | 2005


    Super Slim Automotive Acceleration Sensor Fabrication Process Developed by Applying Surface MEMS Technology

    Muto, Hiroshi / Sugiura, Kazuhiko / Asami, Kazushi et al. | SAE Technical Papers | 2006


    Super slim automotive acceleration sensor fabrication process developed by applying surface MEMS technology

    Yokoyama, K. / Sugiura, K. / Fukada, T. et al. | British Library Conference Proceedings | 2006