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    Titel :

    Super slim automotive acceleration sensor fabrication process developed by applying surface MEMS technology



    Kongress:

    Fall Annual congress, Society of Automotive Engineers of Japan; 2006 JSAE annual congress ; 2006 ; Sapporo, Japan



    Erscheinungsdatum :

    2006-01-01


    Format / Umfang :

    141-06


    Anmerkungen:

    Text in Japanese & English. Papers 82-06 - 142-06 with gaps



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Japanisch




    Super Slim Automotive Acceleration Sensor Fabrication Process Developed by Applying Surface MEMS Technology

    Muto, Hiroshi / Sugiura, Kazuhiko / Asami, Kazushi et al. | SAE Technical Papers | 2006



    Super Slim Automotive Acceleration Sensor Applied MEMS Technology

    Isobe, Y. | British Library Conference Proceedings | 2006


    Ultra-slim automotive acceleration sensor applied MEMS technology

    Isobe,Y. / Fukada,T. / Muto,H. et al. | Kraftfahrwesen | 2005


    Ultra-Slim Automotive Acceleration Sensor Applied MEMS Technology

    Hiroshi, Muto / Fujino, Seiji / Fukada, Tsuyoshi et al. | SAE Technical Papers | 2005